[Open Access]
Performance and reliability improvements in SiC(0001) MOS devices via two-step annealing in H2/Ar gas mixtures
2025 Appl. Phys. Express 18 081002
iopscience.iop.org/article/10.3...
#APEX
#OpenAccess
#Physics
#SiC
#SiO2
#density
#MOS
#MOSFET
#hydrogen
#annealing
#passivation