[Open Access]
Fabrication of low-resonant-frequency inertial MEMS using through-silicon DRIE applied to silicon-on-glass
2024 Jpn. J. Appl. Phys. 63 056501
iopscience.iop.org/article/10.3...
#JJAP
#physics
#Openaccess
#MEMS
#inertial
#sensor
#DRIE
#Silicon
#Glass