3D nanoscale fabrication and imaging: a multimodal approach for in situ and super-resolution characterization
A DETC-based #photoresist enables simultaneous #nanoscale fabrication & in situ imaging, achieving 50-nm resolution and closed-loop optimization of 3D #nanodevices—advancing #nanophotonics, #biosensing, and optical storage.
#NanoManufacturing #3DPrinting
#IJEM: doi.org/10.1088/2631...