[Open Access]
Crystallinity improvement of physical-vapor-deposited WS2 films by controlling particle energy
2025 Jpn. J. Appl. Phys. 64 02SP08
iopscience.iop.org/article/10.3...
#JJAP
#physics
#Openaccess
#TMDC
#tungsten
#disulfide
#2D
#material
#sputtering
#PVD